B-4 : Driving the plasma process innovation via the meta-distribution perspectives

Organizers:

Representative
・ Prof. Tsuyohito Ito The University of Tokyo
Correspondence
・ Prof. Makoto Kambara Osaka University [email protected]
Organizers
・ Prof. Osamu Sakai The University of Shiga Prefecture
・ Prof. Giichiro Uchida Meijo University
・ Dr. Mnabu Tanaka Kyushu University
・ Dr. Hitoshi Muneoka The University of Tokyo
・ Dr. Tomoki Matsuda Osaka University

Scope:

Materials produced via plasmas are the result of spatiotemporal interaction of various characteristics distributions that present in every stage of the plasma processing; the structural characters and functionalities of these materials are thus determined by or at least associated with how these “meta-distribution” is designed and controlled. To break the spell of the "trade-off of the general process outcomes” and attain novel functional final product with the minimum energy consumption, the processings are to be developed to design and control the state of materials and plasma environment, deviating appropriately from their equilibrium states, where the state probabilities are essentially uniform.
This symposium therefore aims to provide the opportunities to discuss and rethink of this “meta-distribution” in all aspects of plasma processing for future breakthroughs and innovations from the state descriptive indexing perspectives.

Topics:

・equilibrium/non-equilibrium plasma processing
・plasma diagnostics
・Nanoparticulate/nanostructured devices
・plasma state descriptive indexing science
・meta-distribution